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Introduction to Micro-machining

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The Micromachining is the process of machining very small parts with tools smaller than 0.015 inch in diameter and tolerances of just a few tenths. These kinds of micro holes are required in industries like micromachining is a versatile process and is used widely for machining plastic, glass, metal as well as preparing thin foils. The strength of this technique lies in the systematic use of `batch processing' and physical or chemical processes, with well-known advantages: Very low production costs; no theoretical limit to the possible miniaturization; very precise control of the material structure and composition; use of small quantities of material, which can be rare or very pure; the only possible method that can provide access to some physical phenomena. Micro-electromechanical Systems (MEMS) based processes are mainly used in semiconductor industries such as for the fabrication of integrated circuits (IC), chips, etc. These processes require a tight work-room environment to pre...